31 October 1994 Laser diffraction on the inclined narrow slit with the final thickness edges
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Proceedings Volume 1991, Diffractometry and Scatterometry; (1994) https://doi.org/10.1117/12.192009
Event: International Conference on Diffractometry and Scatterometry, 1994, Warszawa, Poland
Abstract
The laser diffraction on the inclined narrow slit with the final thickness edges is investigated experimentally and theoretically. One should notice that Fresnel's diffraction integral is not correct for this case and it is necessary to take into account the repeated reflections of the laser radiation.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Iosif S. Zeilikovich, "Laser diffraction on the inclined narrow slit with the final thickness edges", Proc. SPIE 1991, Diffractometry and Scatterometry, (31 October 1994); doi: 10.1117/12.192009; https://doi.org/10.1117/12.192009
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