31 October 1994 Laser scattering by biopolymers and biotissues (Abstract Only)
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Proceedings Volume 1991, Diffractometry and Scatterometry; (1994) https://doi.org/10.1117/12.192032
Event: International Conference on Diffractometry and Scatterometry, 1994, Warszawa, Poland
Abstract
Physical principles underlying the original noncontact optical-correlation techniques for surface diagnostics are discussed. The performance of the optical correlation devices is compared with that of the available diagnostics systems. The proposed systems for surface diagnostics are based on the relationship between the statistical parameters of the object's structure and the associated correlation parameters of the scattered optical field. The relationship is used in developing diagnostic systems based on the scintillation index, the transverse correlation function, the amplitude variance and the field phase measurements '.The advantage of the proposed systems is the high speed (1.2 seconds) operation which is achieved by performing the statistical data processingwithin the optical channeL The height parameter measurement accuracy is 25 A.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Oleg V. Angelsky, A. D. Arkhelyuk, Serhiy B. Yermolenko, Alexander G. Ushenko, "Laser scattering by biopolymers and biotissues (Abstract Only)", Proc. SPIE 1991, Diffractometry and Scatterometry, (31 October 1994); doi: 10.1117/12.192032; https://doi.org/10.1117/12.192032
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