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31 October 1994 Light scattering by conducting surfaces with one-dimensional roughness
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Proceedings Volume 1991, Diffractometry and Scatterometry; (1994) https://doi.org/10.1117/12.192011
Event: International Conference on Diffractometry and Scatterometry, 1994, Warszawa, Poland
Abstract
We describe experimental measurements of the scattering properties of two conducting surfaces with 1D roughness. The surfaces have been fabricated in photoresist and have been characterized with a stylus that is small compared to the surface correlation length. In studies of diffuse scatter, we present measurements of the four unique elements of the Stokes matrix. Backscattering enhancement and associated polarization effects are observed for the rougher surface while behavior consistent with tangent plane models is seen for the smoother surface. The polarization-dependence of the coherent scatter is also investigated, and comparisons are made with the results calculated for a flat surface. Finally, we briefly present results for the angular correlation functions of intensity, where the coherent effects that produce backscattering enhancement are more directly observed.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kevin A. O'Donnell, Michael E. Knotts, and T. R. Michel "Light scattering by conducting surfaces with one-dimensional roughness", Proc. SPIE 1991, Diffractometry and Scatterometry, (31 October 1994); https://doi.org/10.1117/12.192011
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