31 October 1994 Optical Fourier transform diffractometry for kinoform technology
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Proceedings Volume 1991, Diffractometry and Scatterometry; (1994) https://doi.org/10.1117/12.192041
Event: International Conference on Diffractometry and Scatterometry, 1994, Warszawa, Poland
Abstract
This paper presents a simple technique of phase retardation measurement applied to phase object manufacturing. This method is based on computer aided analysis of diffraction pattern generated by phase object. Application of this method to known intensity distribution in Fourier spectrum allows to find phase distribution in an object. The method is especially aligned for techniques where an unknown phase modulation is gained by the exposure of a photosensitive media. The described method can help to predict the desired phase shift from exposure. The phase retardation measurement technique presented in this paper is especially aligned to the problem of Holographic Optical Elements (HOE) manufacturing.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Maciej Sypek, Maciej Sypek, Mariusz Krukowski, Mariusz Krukowski, Piotr Borowik, Piotr Borowik, } "Optical Fourier transform diffractometry for kinoform technology", Proc. SPIE 1991, Diffractometry and Scatterometry, (31 October 1994); doi: 10.1117/12.192041; https://doi.org/10.1117/12.192041
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