System for surface roughness control of plane and spherical very smooth surfaces

Oleg V. Angelsky; Ivan A. Buchkovsky; Peter P. Maksimyak

doi:10.1117/12.192014

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31 October 1994 System for surface roughness: control of plane and spherical very smooth surfaces

Oleg V. Angelsky, Ivan A. Buchkovsky, Peter P. Maksimyak

Proceedings Volume 1991, Diffractometry and Scatterometry; (1994) https://doi.org/10.1117/12.192014
Event: International Conference on Diffractometry and Scatterometry, 1994, Warszawa, Poland

Abstract

The relationship between statistical structure parameters of rough surface and associated correlation parameters of scattered field is used to develop the methods for rough surface diagnostics. The treatment is based on the model of random phase object with inhomogeneity phase dispersion. The proposed diagnostic method is applicable to plane and spherical verysmooth surfaces. The sensitivity limit of the method in measuring the standard deviation of surface profile from base line is about 0.003 micrometers .

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Oleg V. Angelsky, Ivan A. Buchkovsky, and Peter P. Maksimyak "System for surface roughness: control of plane and spherical very smooth surfaces", Proc. SPIE 1991, Diffractometry and Scatterometry, (31 October 1994); https://doi.org/10.1117/12.192014

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