15 December 1993 High-performance microphotonic devices with microactuator
Author Affiliations +
Abstract
Miniature active optical components with micro actuator are developed to miniaturize active optical components and sensors. The piezoelectric micro actuator and the miniature 2-D optical scanner, these are the key devices of the components, and its applications are described in detail.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hiroshi Goto, "High-performance microphotonic devices with microactuator", Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); doi: 10.1117/12.165704; https://doi.org/10.1117/12.165704
PROCEEDINGS
8 PAGES


SHARE
Back to Top