Miniature active optical components with micro actuator are developed to miniaturize active optical components and sensors. The piezoelectric micro actuator and the miniature 2-D optical scanner, these are the key devices of the components, and its applications are described in detail.
Hiroshi Goto, Hiroshi Goto,
"High-performance microphotonic devices with microactuator", Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); doi: 10.1117/12.165704; https://doi.org/10.1117/12.165704