15 December 1993 Integrated waveguide device for magneto-optical disk signal detection and its fabrication techniques
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Abstract
We propose an integrated optical polarization detection device for magneto-optical disk pickups. The device has a prism coupler and a TE/TM mode splitter which is monolithically integrated on a silicon substrate with p-i-n photodiodes and two optical waveguides with different effective indices of refraction. These two waveguides are connected at two tapered transition regions. This paper describes the device fabrication techniques and the performance of each element integrated in the device. The optical waveguide TE/TM mode splitter is shown to have wide tolerance for wavelength change, fabrication error, or deviation from designed incident angle.
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Shunsuke Fujita, Shunsuke Fujita, Tami Kihara, Tami Kihara, Magane Aoki, Magane Aoki, Akihiko Hiroe, Akihiko Hiroe, Kiyoshi Yokomori, Kiyoshi Yokomori, } "Integrated waveguide device for magneto-optical disk signal detection and its fabrication techniques", Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); doi: 10.1117/12.165682; https://doi.org/10.1117/12.165682
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