15 December 1993 Microfabricated optical chopper
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Abstract
A micromachined chopper has demonstrated modulation of coherent and incoherent light. The chopper uses an electro-statically driven lateral micromotor to actuate a shutter plate across a through-substrate window. Test devices have been fabricated and exhibit operating frequencies ranging from 1 to 31 kHz and have stable defection amplitudes of 400 micrometers . Further optimizations of the design are discussed.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael T. Ching, Reid A. Brennen, Richard M. White, "Microfabricated optical chopper", Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); doi: 10.1117/12.165705; https://doi.org/10.1117/12.165705
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