15 December 1993 Miniaturized optical systems for beam deflection and modulation
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A new configuration of three micro-optical elements has been proposed for the realization of miniaturized optical beam deflection and modulation modules: One element with a special surface corrugation profile is placed in the focal plane of two microlenses or microlens arrays, one for focussing the incoming beam(s) and the second for output beam collimation. When the middle element is moved in lateral direction with respect to the optical axis, the parameters of the optical beam(s) is/are influenced depending on the real micro-optic structure. The results of first experiments on optical beam deflection and phase modulation are demonstrated.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rolf Goering, Wolfgang Berner, and Ernst-Bernhard Kley "Miniaturized optical systems for beam deflection and modulation", Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); doi: 10.1117/12.165707; https://doi.org/10.1117/12.165707

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