15 December 1993 Precise alignment of optical fibers using a microfabricated silicon device
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Abstract
A mechanical splice has been developed that aligns optical fibers with precision approaching fusion splices. This novel device was made using bulk silicon microfabrication processes and can be cost effectively manufactured. The basic concept can be applied to fiber arrays and active devices.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Melvin H. Johnson "Precise alignment of optical fibers using a microfabricated silicon device", Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); doi: 10.1117/12.165696; https://doi.org/10.1117/12.165696
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