15 December 1993 Preshaping photoresist for refractive microlens array fabrication
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Refractive microlenses are fabricated by the P2ROM (Preshaped Photoresist Refractive Optics by Melting) process. A polar coordinate HeCd laser beam lithography system (laser writer) is used to directly expose a continuous spheroidal profile into photoresist to fabricate 200 micrometers diameter microlenses with speeds between F/1.5 and F/5. Interferometric surface measurements, used to determine optical quality of the preshaped microlenses, indicate reduced spherical aberration in slow lenses fabricated by this method.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Theresa Rubico Jay, Theresa Rubico Jay, Margaret B. Stern, Margaret B. Stern, } "Preshaping photoresist for refractive microlens array fabrication", Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); doi: 10.1117/12.165698; https://doi.org/10.1117/12.165698

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