Testing and measurement of microlenses

Keith O. Mersereau; Randall J. Crisci; Casimir R. Nijander; Wesley P. Townsend; Daniel J. Daly; Michael C. Hutley

doi:10.1117/12.165690

15 December 1993 Testing and measurement of microlenses

Keith O. Mersereau, Randall J. Crisci, Casimir R. Nijander, Wesley P. Townsend, Daniel J. Daly, Michael C. Hutley

Proceedings Volume 1992, Miniature and Micro-Optics and Micromechanics; (1993) https://doi.org/10.1117/12.165690
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

Microlenses and microlens arrays present challenging measurement problems to manufacturer and user alike. Standard techniques designed for testing larger optical components are impractical for lenses with dimensions of only a few hundred micrometers. We present several methods for characterizing the wavefront, focal length, surface profile, and other parameters of microlenses and microlens arrays. The use of Mach-Zehnder and Twyman-Green interferometers for wavefront and focal length measurement are discussed in some detail.

Citation Download Citation

Keith O. Mersereau, Randall J. Crisci, Casimir R. Nijander, Wesley P. Townsend, Daniel J. Daly, and Michael C. Hutley "Testing and measurement of microlenses", Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); https://doi.org/10.1117/12.165690

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