Aspheric surface testing by a phase-shifting shearing interferometer

Hong Gao; Qiming Xin; Kaixiang Huang; Robert E. Parks

doi:10.1117/12.167963

1 February 1994 Aspheric surface testing by a phase-shifting shearing interferometer

Hong Gao, Qiming Xin, Kaixiang Huang, Robert E. Parks

Proceedings Volume 1994, Advanced Optical Manufacturing and Testing IV; (1994) https://doi.org/10.1117/12.167963
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

An interferometric system for aspheric surface testing is described. The system consists of a lateral shearing interferometer with a polarization phase shifter, CCD camera, a video frame grabber and a computer. A key element of the interferometer is a plane parallel birefringent plate which can give any amount of lateral shear. Phase shifting interferometry is used to obtain the derivative information of the wavefront under test. By integrating the derivative data, we have the wavefront shape. The system has measured surfaces with rms repeatability of better than (lambda) /20.

Citation Download Citation

Hong Gao, Qiming Xin, Kaixiang Huang, and Robert E. Parks "Aspheric surface testing by a phase-shifting shearing interferometer", Proc. SPIE 1994, Advanced Optical Manufacturing and Testing IV, (1 February 1994); https://doi.org/10.1117/12.167963

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