1 February 1994 Aspheric surface testing by a phase-shifting shearing interferometer
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Abstract
An interferometric system for aspheric surface testing is described. The system consists of a lateral shearing interferometer with a polarization phase shifter, CCD camera, a video frame grabber and a computer. A key element of the interferometer is a plane parallel birefringent plate which can give any amount of lateral shear. Phase shifting interferometry is used to obtain the derivative information of the wavefront under test. By integrating the derivative data, we have the wavefront shape. The system has measured surfaces with rms repeatability of better than (lambda) /20.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hong Gao, Qiming Xin, Kaixiang Huang, Robert E. Parks, "Aspheric surface testing by a phase-shifting shearing interferometer", Proc. SPIE 1994, Advanced Optical Manufacturing and Testing IV, (1 February 1994); doi: 10.1117/12.167963; https://doi.org/10.1117/12.167963
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