Three-dimensional optical profiler using Nomarski interferometry

Hong Gao; Qiming Xin; Robert E. Parks

doi:10.1117/12.167964

1 February 1994 Three-dimensional optical profiler using Nomarski interferometry

Hong Gao; Qiming Xin; Robert E. Parks

Author Affiliations +

Proceedings Volume 1994, Advanced Optical Manufacturing and Testing IV; (1994) https://doi.org/10.1117/12.167964
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

An interferometric optical profiler using Nomarski microscopy has been developed for measuring surface roughness and 3-D profiles. A commercial Nomarski differential interference contrast (DIC) microscope is modified to add a quarter-wave plate for phase- shifting. Quantitative slope data can be obtained by utilizing phase shifting techniques that rotate the analyzer to change the phase difference between the two orthogonally polarized beams. The slope data is integrated to generate surface height. The instrument is insensitive to vibration. It has measured surface features with a repeatability of better than 1 nm in an ordinary laboratory environment without vibration isolation.

Citation Download Citation

Hong Gao, Hong Gao, Qiming Xin, Qiming Xin, Robert E. Parks, Robert E. Parks, } "Three-dimensional optical profiler using Nomarski interferometry", Proc. SPIE 1994, Advanced Optical Manufacturing and Testing IV, (1 February 1994); doi: 10.1117/12.167964; https://doi.org/10.1117/12.167964

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