1 December 1993 Design review of a high-accuracy UV to near-IR scatterometer
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Abstract
A unique broadband scatterometer has been designed, built and tested for NASA Goddard. One use of the instrument will be to accurately measure the BRDF of calibration standards used by shuttle astronauts in experiments to measure atmospheric ozone. BRDF accuracy is better than 1% except for angles of incidence and scatter greater than 80 degrees. The source employs a high intensity xenon arc and programmable monochromator that allows measurements to be made anywhere from 0.23 to 0.9 micrometers over adjustable bandwidths as small as four nanometers. The goniometer allows out-of-plane measurements to be made in either transmission or reflection from horizontal samples.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tod F. Schiff, Mary W. Knighton, Daniel J. Wilson, Fredrick M. Cady, John C. Stover, James J. Butler, "Design review of a high-accuracy UV to near-IR scatterometer", Proc. SPIE 1995, Optical Scattering: Applications, Measurement, and Theory II, (1 December 1993); doi: 10.1117/12.162643; https://doi.org/10.1117/12.162643
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