New generation high-speed high-resolution hemispherical scatterometer

Raymond J. Castonguay

doi:10.1117/12.162660

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1 December 1993 New generation high-speed high-resolution hemispherical scatterometer

Raymond J. Castonguay

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Proceedings Volume 1995, Optical Scattering: Applications, Measurement, and Theory II; (1993) https://doi.org/10.1117/12.162660
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

A new instrument has been developed that takes hundreds of thousands of points of scattered light data at 0.1 degree(s) resolution over a three dimensional segment of the hemisphere. The data can be acquired and displayed in 0.5 to 20 seconds depending on the amount of data desired. The instrument is the size of a 'shoe box' and provides solid state operation. With the instrument's high resolution three dimensional capability, well-defined three dimensional interference patterns, speckle, and diffraction can be seen in near-real-time. Much of these patterns are out of the plane of incidence and sometimes add significantly to the scatter, and may allow a scattering surface to be characterized through methods not available before. The high speed capability makes this instrument ideal for scattered light measurements to be used for high resolution surface defect quality control on high volume assembly lines.

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Raymond J. Castonguay "New generation high-speed high-resolution hemispherical scatterometer", Proc. SPIE 1995, Optical Scattering: Applications, Measurement, and Theory II, (1 December 1993); https://doi.org/10.1117/12.162660

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