1 December 1993 Step-height standard for surface-profiler calibration
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Abstract
We report on the design and fabrication of an all-silicon test pattern that is very useful for assessing the performance of all types of profiling instruments. We present examples of results obtained from applying this method to various kinds of profiling instruments, including a WYKO TOPO 3D system, Micromap Promap 512 profilers, a ZYGO Maxim 3D system, and scanning probe AFM systems. We also present the results from a measurement of the BRDF of the step with a TMA CASI scatterometer to show the utility of the step as a potential calibration standard for scattered light measuring instruments.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter Z. Takacs, Michelle X.-O. Li, Karen Furenlid, and Eugene L. Church "Step-height standard for surface-profiler calibration", Proc. SPIE 1995, Optical Scattering: Applications, Measurement, and Theory II, (1 December 1993); doi: 10.1117/12.162661; https://doi.org/10.1117/12.162661
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