Application of nonalgorithmic techniques to the analysis of optical Fourier transforms for quality evaluation of small objects

David J. Search; Clifford Allan Hobson; John T. Atkinson; A. Kenneth Porter

doi:10.1117/12.165467

10 December 1993 Application of nonalgorithmic techniques to the analysis of optical Fourier transforms for quality evaluation of small objects

David J. Search, Clifford Allan Hobson, John T. Atkinson, A. Kenneth Porter

Author Affiliations +

Proceedings Volume 2003, Interferometry VI: Techniques and Analysis; (1993) https://doi.org/10.1117/12.165467
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

The feasibility of using diffraction pattern analysis for the quality assessment of small components, with a specific application aimed at electronic components, is discussed. An electro-optical system for the capture of reflected diffraction patterns is presented. Preliminary simulation results for simple faults have been obtained and are used to illustrate the described feature vector and neural network classifier.

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David J. Search, Clifford Allan Hobson, John T. Atkinson, and A. Kenneth Porter "Application of nonalgorithmic techniques to the analysis of optical Fourier transforms for quality evaluation of small objects", Proc. SPIE 2003, Interferometry VI: Techniques and Analysis, (10 December 1993); https://doi.org/10.1117/12.165467

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