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10 December 1993 New algorithm on phase-shifting interferometry: the overlapping averaging 4-frame algorithm
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Abstract
Phase shifting interferometry (PSI) is a highly efficient and accurate phase measuring method. The accuracy of PSI is most seriously impaired by calibration error and nonlinearity in the phase shifter. This paper presents a new algorithm, the overlapping averaging 4-frame (OAF) algorithm, which can reduce the phase error due to phase shifter errors. The relationship between the accuracy of OAF algorithm and phase shifter errors is given. From this relationship, it is verified that the OAF algorithm can reduce the phase error due to phase shifter errors. The computer simulation providing the magnitude of a calibration error and nonlinearity in the phase shifter are shown for a number of different phase-measurement algorithms. From the analysis, the result is obtained that the OAF algorithm is more highly accurate than other phase-measurement algorithms.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rihong Zhu, Jinbang Chen, Qingyun Wang, Lei Chen, and Yiguang Zhang "New algorithm on phase-shifting interferometry: the overlapping averaging 4-frame algorithm", Proc. SPIE 2003, Interferometry VI: Techniques and Analysis, (10 December 1993); https://doi.org/10.1117/12.165470
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