10 December 1993 New measurement of metal surface roughness rq and sm by using dynamical speckle
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Abstract
This essay deals with the characteristics of scattered light on metal surface under the irradiation of dynamic speckles in theory. According to the relationship between the second order moment of the integrate intensity of scattered light in far field and the parameters of surface roughness Rq and Sm, a split system capable of generating dynamic speckles is presented which is made up of ground-glass and a BS mirror. This system causes the coherent plane wave coming from a He-Ne Laser to produce dynamic speckles and then irradiate the metal surface through which the scattered optical field was received by 1-D-CCD which is divided into two signal areas and then form two experiment conditions. Finally, based on the two received contrasting signals, the value of Rq and Sm is determined both individually and at the same time.
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Ying-Dong Liu, Ying-Dong Liu, Yawei Wang, Yawei Wang, } "New measurement of metal surface roughness rq and sm by using dynamical speckle", Proc. SPIE 2003, Interferometry VI: Techniques and Analysis, (10 December 1993); doi: 10.1117/12.165480; https://doi.org/10.1117/12.165480
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