1 March 1994 Dynamic measurement of tiny displacement by dimension reduction
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Abstract
In the field of displacement measurement, the traditional method usually uses a linear receiver for 1D testing and a plane array receiver for 2D testing. In this paper we describe a new method of tiny displacement measurement by dimension reduction. According to this method, a testing system of a 2D displacements is established using a linear receiver, the accuracy of the system is under 3 micrometers , and the problem that 2N-dimensional variables can be measured by N linear receivers is discussed.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yan Liu, Jingwu Xuong, Gengxian He, "Dynamic measurement of tiny displacement by dimension reduction", Proc. SPIE 2004, Interferometry VI: Applications, (1 March 1994); doi: 10.1117/12.172593; https://doi.org/10.1117/12.172593
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KEYWORDS
Receivers

Dimension reduction

Charge-coupled devices

Interferometry

Motion measurement

Reliability

Autocollimators

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