Measurement of Young's modulus on thin films under static and dynamic loading conditions

Gordon C. Brown; Ryszard J. Pryputniewicz

doi:10.1117/12.172604

1 March 1994 Measurement of Young's modulus on thin films under static and dynamic loading conditions

Gordon C. Brown, Ryszard J. Pryputniewicz

Proceedings Volume 2004, Interferometry VI: Applications; (1994) https://doi.org/10.1117/12.172604
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

Measurement of Young's modulus of thin films is an important, yet challenging task. The purpose of this study, was to determine Young's modulus of an aluminum thin film using experimental data measured under static and dynamic loading conditions. The two test objects used in this study, a thin circular plate and a constant rectangular cross section cantilever beam, were constructed from an aluminum thin film. A nanoindenter was used to load the center of the thin circular plate, while simultaneously recording the applied force and displacement of the indenter tip. Then, using a basic equation relating the applied load and displacement to the geometry of the plate and its material properties, Young's modulus was determined. Using the experimental methods of electro-optic holography and laser vibrometry, the resonant frequency for the first bending mode of the cantilever beam was determined. Then, through an equation that relates the first resonant frequency to the material properties and the geometry of the cantilever beam. Young's modulus was determined. Uncertainty analyses of these basic equations, show that the uncertainty in Young's modulus is predominately affected by the measurement uncertainties of film thickness, and result, for the test samples used in this study, with uncertainties of 5 GPa for thickness errors on the order of 0.5 micrometers .

Citation Download Citation

Gordon C. Brown and Ryszard J. Pryputniewicz "Measurement of Young's modulus on thin films under static and dynamic loading conditions", Proc. SPIE 2004, Interferometry VI: Applications, (1 March 1994); https://doi.org/10.1117/12.172604

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