19 November 1993 CUBIC: laboratory testing of 'thin poly' CCDs
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Abstract
CUBIC, the Cosmic Unresolved X-ray Background Instrument Using CCDs, is designed to make moderate resolution X-ray spectral measurements at spatial scales of a few degrees. While the energy range is nominally 200 eV - 10 keV, the CCDs have been designed to maximize the soft X-ray performance by using novel structures. The CUBIC CCDs, fabricated by Loral Fairchild, are 1024 X 1024 pixels in size, with 18 micrometers X 18 micrometers pixels. The CCDs use a new `thin poly' gate structure designed to maximize low energy quantum efficiency, while still retaining the advantages of front-side illumination and the high Charge Transfer Efficiency of a three-phase device. Being front-side illuminated, the design avoids the surface stability problems of backside illuminated devices. Fabrication of the first lot of CCDs and test structures has been completed, and we report laboratory camera testing of the CCDs at Penn State.
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Mark A. Skinner, Mark A. Skinner, David N. Burrows, David N. Burrows, Gordon P. Garmire, Gordon P. Garmire, Ralph Porter Kraft, Ralph Porter Kraft, David H. Lumb, David H. Lumb, John A. Nousek, John A. Nousek, } "CUBIC: laboratory testing of 'thin poly' CCDs", Proc. SPIE 2006, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy IV, (19 November 1993); doi: 10.1117/12.162838; https://doi.org/10.1117/12.162838
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