Focusing of x-rays using micromachined silicon lobster eye lenses

Andrew W. Chen; Philip E. Kaaret; Thomas W. Kenny

doi:10.1117/12.167199

1 February 1994 Focusing of x-rays using micromachined silicon lobster eye lenses

Andrew W. Chen, Philip E. Kaaret, Thomas W. Kenny

Proceedings Volume 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II; (1994) https://doi.org/10.1117/12.167199
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

We are developing a novel x-ray lens based on a 1D analogue of the optical system of the lobster's eye. The lobster eye lens consists of a large number of flat reflecting surfaces with 100 micrometers separation between adjacent surfaces. We have used silicon micromachining to fabricate arrays of 100 micrometers sized optical elements in <110> oriented single crystal silicon wafers. We used a concentrated KOH solution to anisotropically etch single crystal silicon wafers; the resulting surfaces were aligned with the <111> planes perpendicular to the face of the wafer. The pores were 50 micrometers wide and 800 micrometers deep, for an aspect ratio of 16:1. We report on the fabrication techniques and measurements of the surface microroughness of the etched surfaces.

Citation Download Citation

Andrew W. Chen, Philip E. Kaaret, and Thomas W. Kenny "Focusing of x-rays using micromachined silicon lobster eye lenses", Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); https://doi.org/10.1117/12.167199

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