High-resolution x-ray scatter and reflectivity study of sputtered IR surfaces

Finn Erland Christensen; Salim Abdali; Allan Hornstrup; Herbert W. Schnopper; Patrick O. Slane; Suzanne E. Romaine

doi:10.1117/12.167242

1 February 1994 High-resolution x-ray scatter and reflectivity study of sputtered IR surfaces

Finn Erland Christensen, Salim Abdali, Allan Hornstrup, Herbert W. Schnopper, Patrick O. Slane, Suzanne E. Romaine

Proceedings Volume 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II; (1994) https://doi.org/10.1117/12.167242
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

In recent years there has been an increased interest in the possible use of Ir as the reflecting surface in X-ray telescope programs. An X-ray study of such surfaces produced by sputtering of Ir on highly polished Zerodur flats is presented here. The study was performed using Fe K(alpha) ₁ (6.404 Kev) and Cu K(alpha) ₁ (8.048 keV) and includes measurement of total external reflection and scattering. The scattering measurement was made with three different instruments arrangements; one employed a 1D position sensitive detector for low resolution studies giving approximately 30 arcsec resolution (FWHM), and the other two arrangements employed channel cut crystals providing resolutions (FWHM) of 5 arcsec and 1 arcsec, respectively at Cu K(alpha) ₁. The reflectivity study revealed a very close correspondence with a theoretical model based on recently published optical constants. This important result shows that an Ir coating can be produced with nominal bulk density.

Citation Download Citation

Finn Erland Christensen, Salim Abdali, Allan Hornstrup, Herbert W. Schnopper, Patrick O. Slane, and Suzanne E. Romaine "High-resolution x-ray scatter and reflectivity study of sputtered IR surfaces", Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); https://doi.org/10.1117/12.167242

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