1 February 1994 Image quality, surface statistics, and all that
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Abstract
This paper describes and illustrates simple expressions for determining the effects of conventional and fractal surface errors on the performance of a simple imaging system, and conversely, of specifying surface-finish parameters in terms of system performance requirements.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eugene L. Church, Peter Z. Takacs, "Image quality, surface statistics, and all that", Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); doi: 10.1117/12.167229; https://doi.org/10.1117/12.167229
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