1 February 1994 Image quality, surface statistics, and all that
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Abstract
This paper describes and illustrates simple expressions for determining the effects of conventional and fractal surface errors on the performance of a simple imaging system, and conversely, of specifying surface-finish parameters in terms of system performance requirements.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eugene L. Church, Eugene L. Church, Peter Z. Takacs, Peter Z. Takacs, } "Image quality, surface statistics, and all that", Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); doi: 10.1117/12.167229; https://doi.org/10.1117/12.167229
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