1 February 1994 Interface roughness characterization using x-ray standing waves
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Abstract
An X-ray standing wave technique was used to characterize the interface roughness of multilayer structures. Standing wave fields of X-rays in multilayers are described in terms of a modified optical matrix. To include the interface roughness effect, Fresnel reflectance and transmittance coefficients in the matrix were modified. A Ni/C multilayer with about 54 angstroms periods was analyzed by X-ray diffraction and by the X-ray standing wave technique. The ratio between second and third Bragg reflection peaks suggested an expansion of nickel layer thickness. The X-ray standing wave measurement showed a reduction of nickel layer density, suggesting the diffusion of nickel atoms and formation of nickel-carbon complex. Interface roughness was estimated to be about 10 angstroms from the calculation at 85% bulk density of nickel, suggesting the diffusion of nickel.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tomoaki Kawamura, Tomoaki Kawamura, Hisataka Takenaka, Hisataka Takenaka, "Interface roughness characterization using x-ray standing waves", Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); doi: 10.1117/12.167228; https://doi.org/10.1117/12.167228
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