1 February 1994 Studies toward the optimization of ion polishing for multilayer x-ray mirrors
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Abstract
Multilayer mirrors of Co, Ni or Ru with spacer layer of C or B4C are fabricated by electron-beam deposition with ion polishing of all metal layers. Improved performance over previous work is obtained for the mirrors containing Co and Ru. Very smooth boundaries are obtained for Ni films, however, this smoothness is only obtained for coatings with a small number of layers.
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Eberhard Adolf Spiller, Eberhard Adolf Spiller, Ki-Byoung Youn, Ki-Byoung Youn, } "Studies toward the optimization of ion polishing for multilayer x-ray mirrors", Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); doi: 10.1117/12.167205; https://doi.org/10.1117/12.167205
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