PROCEEDINGS VOLUME 2014
SPIE'S 1993 INTERNATIONAL SYMPOSIUM ON OPTICS, IMAGING, AND INSTRUMENTATION | 11-16 JULY 1993
Charged-Particle Optics
IN THIS VOLUME

2 Sessions, 19 Papers, 0 Presentations
SPIE'S 1993 INTERNATIONAL SYMPOSIUM ON OPTICS, IMAGING, AND INSTRUMENTATION
11-16 July 1993
San Diego, CA, United States
Charged-Particle Optics I
Proc. SPIE 2014, Computational modeling techniques in charged-particle optics, 0000 (3 September 1993); doi: 10.1117/12.155686
Proc. SPIE 2014, Snorkel-type conical objective lens with E cross B field for detecting secondary electrons, 0000 (3 September 1993); doi: 10.1117/12.155697
Proc. SPIE 2014, New developments in personal computer software for accelerator simulation and analysis, 0000 (3 September 1993); doi: 10.1117/12.155699
Proc. SPIE 2014, Computer simulation of electron optical characteristics of accelerating tube for high-voltage electron microscope, 0000 (3 September 1993); doi: 10.1117/12.155700
Proc. SPIE 2014, Design of a multimode transport lens with optimization program SOEM, 0000 (3 September 1993); doi: 10.1117/12.155701
Proc. SPIE 2014, Surface-charge method and electron ray tracing on vector pipeline supercomputers, 0000 (3 September 1993); doi: 10.1117/12.155702
Charged-Particle Optics II
Proc. SPIE 2014, High-throughput projection electron-beam lithography employing SCALPEL, 0000 (3 September 1993); doi: 10.1117/12.155703
Proc. SPIE 2014, Aberration problem in electron optics, 0000 (3 September 1993); doi: 10.1117/12.155704
Proc. SPIE 2014, Design of an achromatic mass separator for a focused-ion-beam system, 0000 (3 September 1993); doi: 10.1117/12.155687
Proc. SPIE 2014, Compact, precision electrostatic quadrupole lens system for high-brightness ion-beam transport and focusing, 0000 (3 September 1993); doi: 10.1117/12.155688
Proc. SPIE 2014, Computer simulation of energetic Boersch effect in the diode region of the field emission gun, 0000 (3 September 1993); doi: 10.1117/12.155689
Proc. SPIE 2014, Simulation and interpretation of scanning electron microscope images, 0000 (3 September 1993); doi: 10.1117/12.155690
Proc. SPIE 2014, Using optimum magnification as a figure of merit to evaluate the performance of focused-ion-beam columns, 0000 (3 September 1993); doi: 10.1117/12.155691
Proc. SPIE 2014, Performance characteristics of integrated low-energy broad ion beam extraction optics, 0000 (3 September 1993); doi: 10.1117/12.155692
Proc. SPIE 2014, Interpolation method for ray tracing in electrostatic fields calculated by the finite element method, 0000 (3 September 1993); doi: 10.1117/12.155693
Proc. SPIE 2014, Computer-aided design of photomultiplier tubes using a 3D program, 0000 (3 September 1993); doi: 10.1117/12.155694
Proc. SPIE 2014, SIMS input lens, 0000 (3 September 1993); doi: 10.1117/12.155695
Proc. SPIE 2014, Higher-order aberrations in sector field and quadrupole systems, 0000 (3 September 1993); doi: 10.1117/12.155696
Proc. SPIE 2014, New evaluation method for the depth of field in terms of the information-passing capacity, 0000 (3 September 1993); doi: 10.1117/12.155698
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