Aberration problem in electron optics

Albert V. Crewe

doi:10.1117/12.155704

3 September 1993 Aberration problem in electron optics

Albert V. Crewe

Proceedings Volume 2014, Charged-Particle Optics; (1993) https://doi.org/10.1117/12.155704
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

This paper discusses what appears to be a crisis in the field of electron microscope--a term which is broad enough to include ion microscopy, just as the term electron optics includes ion optics. The crisis is that we seem to have reached a performance limit in all instruments, and there are no known or proven ways to improve upon present levels.

Citation Download Citation

Albert V. Crewe "Aberration problem in electron optics", Proc. SPIE 2014, Charged-Particle Optics, (3 September 1993); https://doi.org/10.1117/12.155704

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