3 September 1993 Aberration problem in electron optics
Author Affiliations +
This paper discusses what appears to be a crisis in the field of electron microscope--a term which is broad enough to include ion microscopy, just as the term electron optics includes ion optics. The crisis is that we seem to have reached a performance limit in all instruments, and there are no known or proven ways to improve upon present levels.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Albert V. Crewe, Albert V. Crewe, } "Aberration problem in electron optics", Proc. SPIE 2014, Charged-Particle Optics, (3 September 1993); doi: 10.1117/12.155704; https://doi.org/10.1117/12.155704

Back to Top