Computational modeling techniques in charged-particle optics

Eric Munro

doi:10.1117/12.155686

3 September 1993 Computational modeling techniques in charged-particle optics

Eric Munro

Proceedings Volume 2014, Charged-Particle Optics; (1993) https://doi.org/10.1117/12.155686
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

In this paper, some of the key techniques used in the computer modelling of charged particle optical systems are reviewed and illustrated. The topics covered include: Magnetic electron lens design using the finite element method; electrostatic lens design by finite element and finite difference methods; analysis of matrix lenses and multipole lenses, using a fully three- dimensional (3D) finite difference analysis; treatment of asymmetry errors in construction and alignment of electron lenses, using perturbation methods; analysis of electrostatic and magnetic deflection fields by finite difference, boundary integral and finite element methods; design of complete electron and ion beam columns containing arbitrary combinations of lenses and deflectors; simulation of discrete Coulomb interaction effects and diffraction effects; 3D simulation of fields and trajectories in secondary electron detectors for topographic and voltage contrast; design of electron sources, using second-order finite element method; design and aberration analysis of curved axis systems, such as imaging energy filters, using wavefront aberrations; and the dynamic correction of deflection aberrations in high- performance scanning systems. All the examples presented in the paper have been run and plotted on a personal computer system.

Citation Download Citation

Eric Munro "Computational modeling techniques in charged-particle optics", Proc. SPIE 2014, Charged-Particle Optics, (3 September 1993); https://doi.org/10.1117/12.155686

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