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3 September 1993 Design of an achromatic mass separator for a focused-ion-beam system
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Abstract
The design of an achromatic mass separator which consists of two ExB filters, a stigmator, and the separation aperture is described. The optical properties of the ExB filters are derived. The influence of the designed mass separator on the spatial resolution of the column and the fringing field effects are discussed. First experimental results are shown.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jochen Teichert and Michail A. Tiunov "Design of an achromatic mass separator for a focused-ion-beam system", Proc. SPIE 2014, Charged-Particle Optics, (3 September 1993); https://doi.org/10.1117/12.155687
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