1 February 1994 Average velocity distribution measurements of target debris from a laser-produced plasma
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Abstract
Measurements of the velocity and particulate size distributions as well as calculations of ejected mass have been made on solid Sn and Au laser-produced plasma (LPP) targets. The experiments were conducted under conditions associated with soft x-ray projection lithography (SXPL). Results indicate that small particulates, less than 1 - 2 micrometers in diameter, with speeds in excess of 9000 cm/s, are the dominant constituents of the debris.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Howard Bender, Ann Marie Paula Eligon, D. O'Connell, William T. Silfvast, "Average velocity distribution measurements of target debris from a laser-produced plasma", Proc. SPIE 2015, Applications of Laser Plasma Radiation, (1 February 1994); doi: 10.1117/12.167987; https://doi.org/10.1117/12.167987
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