6 December 1993 Building world-class microlithographic lens systems: optical material requirements and qualification methods
Author Affiliations +
Abstract
Building successive generations of state-of-the-art wide field, sub-micron microlithographic lens systems dictates ever-tightening material tolerances that challenge glass manufacturers. This paper discusses the optical material needs for microlithographic lens systems and Tropel's in-house material qualification program. Material qualification is divided into three successive stages: (1) fluorescence testing to qualitatively analyze color center characteristics of the material; (2) homogeneity testing to determine the relative volumetric variations in index; and (3) absolute index testing at multiple wavelengths to determine the material's dispersion characteristics.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul R. DeStefano, Paul R. DeStefano, Paul F. Michaloski, Paul F. Michaloski, } "Building world-class microlithographic lens systems: optical material requirements and qualification methods", Proc. SPIE 2018, Passive Materials for Optical Elements II, (6 December 1993); doi: 10.1117/12.165236; https://doi.org/10.1117/12.165236
PROCEEDINGS
12 PAGES


SHARE
RELATED CONTENT

VPHG in the cold
Proceedings of SPIE (January 29 2003)
VST correctors transmission
Proceedings of SPIE (July 05 2006)
Proton-induced radiation effects on optical glasses
Proceedings of SPIE (January 10 1993)

Back to Top