Epitaxial lead-chalcogenides on fluoride/Si for IR-sensor array applications

Hans Zogg; Alexander Fach; Clau Maissen; Jiri Masek; Stefan Blunier; K. Kessler; Peter Mueller; Carmine Paglino; Stefan I. Teodoropol; A. N. Tiwari

doi:10.1117/12.164936

7 December 1993 Epitaxial lead-chalcogenides on fluoride/Si for IR-sensor array applications

Hans Zogg, Alexander Fach, Clau Maissen, Jiri Masek, Stefan Blunier, K. Kessler, Peter Mueller, Carmine Paglino, Stefan I. Teodoropol, A. N. Tiwari

Author Affiliations +

Proceedings Volume 2021, Growth and Characterization of Materials for Infrared Detectors; (1993) https://doi.org/10.1117/12.164936
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

MBE growth and IR device fabrication with epitaxial IV-VI layers on Si-substrates is reviewed and some new results are included. Epitaxy is achieved using a stacked BaF₂/CaF₂ or CaF₂ buffer layer. While photolithographic delineation techniques are somewhat difficult with BaF₂ (which is soluble in water), reliable wet-etching techniques are easy with the CaF₂ buffer. Photovoltaic IV-VI sensors on Si(111) substrates are fabricated with cut-off wavelengths covering the whole atmospheric 3 - 5 and 8 - 14 micrometers window. They offer the possibility for low cost IR focal plane arrays with sensitivities similar to MCT, but with much less demanding material processing steps.

Citation Download Citation

Hans Zogg, Alexander Fach, Clau Maissen, Jiri Masek, Stefan Blunier, K. Kessler, Peter Mueller, Carmine Paglino, Stefan I. Teodoropol, and A. N. Tiwari "Epitaxial lead-chalcogenides on fluoride/Si for IR-sensor array applications", Proc. SPIE 2021, Growth and Characterization of Materials for Infrared Detectors, (7 December 1993); https://doi.org/10.1117/12.164936

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available