16 December 1993 Fabrication and design considerations for multilevel active polymeric devices
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Recently interest has been growing in exploiting the advantageous fabrication properties of electro-optic polymer materials for optical interconnect applications. For many of these applications a technology for fabricating multilevel registered waveguide structures will be required. Described here is the use of a projection printing technique of waveguide fabrication which has been used to demonstrate a registered two level Mach-Zehnder modulator array. The details of this fabrication technique and design considerations for the multiple level device are presented.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thomas Anthony Tumolillo, Paul R. Ashley, "Fabrication and design considerations for multilevel active polymeric devices", Proc. SPIE 2025, Nonlinear Optical Properties of Organic Materials VI, (16 December 1993); doi: 10.1117/12.165290; https://doi.org/10.1117/12.165290

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