16 December 1993 Fabrication and design considerations for multilevel active polymeric devices
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Abstract
Recently interest has been growing in exploiting the advantageous fabrication properties of electro-optic polymer materials for optical interconnect applications. For many of these applications a technology for fabricating multilevel registered waveguide structures will be required. Described here is the use of a projection printing technique of waveguide fabrication which has been used to demonstrate a registered two level Mach-Zehnder modulator array. The details of this fabrication technique and design considerations for the multiple level device are presented.
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Thomas Anthony Tumolillo, Paul R. Ashley, "Fabrication and design considerations for multilevel active polymeric devices", Proc. SPIE 2025, Nonlinear Optical Properties of Organic Materials VI, (16 December 1993); doi: 10.1117/12.165290; https://doi.org/10.1117/12.165290
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