9 November 1993 Formation of optical disk direction paths and optical master disks with the help of inorganic resists
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Abstract
In this work, the results of investigations performed on As40S40Se20 and As40S60 layers are presented, peculiarities of optical disks direction paths and optical master disks formation with the help of laser lithography are described.
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Sergey A. Kostyukevych, Sergey A. Kostyukevych, Peter E. Shepeljavi, Peter E. Shepeljavi, Ivan Z. Indutnyi, Ivan Z. Indutnyi, Alexander V. Stronski, Alexander V. Stronski, Apollinary I. Stetsun, Apollinary I. Stetsun, } "Formation of optical disk direction paths and optical master disks with the help of inorganic resists", Proc. SPIE 2026, Photonics for Processors, Neural Networks, and Memories, (9 November 1993); doi: 10.1117/12.163608; https://doi.org/10.1117/12.163608
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