1 February 1994 Investigation of substrate temperature effect on the surface morphology of excimer laser deposited YBa2Cu3O7/CeO2 films on sapphire
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Abstract
Excimer laser ablation is an excellent means of depositing high temperature superconducting (HTS) thin films because of high quality electrical properties of the resulting films and also because of the relative simplicity of the deposition system. The principal disadvantage of laser ablation is the contamination of the deposited film by particles, leading to a rough film surface. The influence of substrate temperature on surface morphology in YBa2Cu3O7 thin films deposited by excimer laser on r-plane sapphire with a CeO2 buffer layer has been investigated. The substrate temperature was measured using gold-nickel thermocouples on the substrate surface during deposition. The optimal deposition temperatures were found to be lower in comparison with films deposited on LaAlO3 because damage occurs to the buffer layer. Special attention was paid to the occurrence of droplets and outgrowths in the films. The ablation process produces droplets that range from 0.1 micrometers to a maximum of 1 micrometers in size. In the course of film growth these droplets undergo metamorphosis and form the basis of outgrowths.
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Peter D. Grant, Peter D. Grant, Hue T. Tran, Hue T. Tran, M. W. Denhoff, M. W. Denhoff, } "Investigation of substrate temperature effect on the surface morphology of excimer laser deposited YBa2Cu3O7/CeO2 films on sapphire", Proc. SPIE 2045, Laser-Assisted Fabrication of Thin Films and Microstructures, (1 February 1994); doi: 10.1117/12.167574; https://doi.org/10.1117/12.167574
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