1 February 1994 Laser-annealed thin-film fiber-optic temperature sensor
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Abstract
A fiber-optic temperature sensor has been fabricated by sputtering a silicon film, together with some protective overlayers, directly onto the end of an optical fiber. The approximately one- micrometers thick silicon film serves as a Fabry-Perot etalon whose resonant wavelengths vary as functions of temperature due to changes in the film's refractive index. To manufacture a sensor with adequate long-term stability, the initially amorphous silicon film must be annealed. Laser annealing has been found to be a promising means to stabilize the silicon film's structure without degrading the optical fiber's protective buffer coating.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Glenn Beheim, Glenn Beheim, Jorge L. Sotomayor, Jorge L. Sotomayor, Meg L. Tuma, Meg L. Tuma, Massood Tabib-Azar, Massood Tabib-Azar, } "Laser-annealed thin-film fiber-optic temperature sensor", Proc. SPIE 2045, Laser-Assisted Fabrication of Thin Films and Microstructures, (1 February 1994); doi: 10.1117/12.167561; https://doi.org/10.1117/12.167561
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