1 February 1994 Laser-annealed thin-film fiber-optic temperature sensor
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Abstract
A fiber-optic temperature sensor has been fabricated by sputtering a silicon film, together with some protective overlayers, directly onto the end of an optical fiber. The approximately one- micrometers thick silicon film serves as a Fabry-Perot etalon whose resonant wavelengths vary as functions of temperature due to changes in the film's refractive index. To manufacture a sensor with adequate long-term stability, the initially amorphous silicon film must be annealed. Laser annealing has been found to be a promising means to stabilize the silicon film's structure without degrading the optical fiber's protective buffer coating.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Glenn Beheim, Jorge L. Sotomayor, Meg L. Tuma, Massood Tabib-Azar, "Laser-annealed thin-film fiber-optic temperature sensor", Proc. SPIE 2045, Laser-Assisted Fabrication of Thin Films and Microstructures, (1 February 1994); doi: 10.1117/12.167561; https://doi.org/10.1117/12.167561
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