1 February 1994 Laser-beam direct writing of fine lines of alpha-Fe2O3 from metalorganic spin-coated films and transient behavior study of laser decomposition process
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Abstract
Fine lines of (alpha) -Fe2O3 have been formed on quartz substrates by laser beam direct writing on metalorganic (MO) spin-coated films. A modulated krypton ion writing laser beam and a He-Ne probing laser beam were colinearly focused onto the films with a spot size about 10 - 50 micrometers . A series of characterizations were conducted on the written lines by employing characterization techniques ranging from TGA, FTIR, SEM, XRD, to TEM. In this way a better understanding has been achieved regarding the metalorganic decomposition mechanism, structure and morphology of the laser written lines. From the time-resolved transmittance change induced by the krypton ion laser pulse irradiation, transient behavior of laser decomposition process of metalorganic materials has been studied.
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Songsheng Xue, Songsheng Xue, Wahib Ousi-Benomar, Wahib Ousi-Benomar, Roger A. Lessard, Roger A. Lessard, } "Laser-beam direct writing of fine lines of alpha-Fe2O3 from metalorganic spin-coated films and transient behavior study of laser decomposition process", Proc. SPIE 2045, Laser-Assisted Fabrication of Thin Films and Microstructures, (1 February 1994); doi: 10.1117/12.167562; https://doi.org/10.1117/12.167562
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