1 February 1994 Laser fabrication of three-dimensional microstructures, cavities, and columns
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A laser processing system is developed for laser microfabrication and micromachining of 3-D microstructures. We show the feasibility of laser induced chlorine etching of silicon under SiO2 and Si3N4 membranes for the formation of underlying cavities and tunnels. Deposition of tungsten and silicon columns on SiOxNy/Si substrates is also demonstrated.
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Bing Shen, Bing Shen, Ricardo Izquierdo, Ricardo Izquierdo, Michel Meunier, Michel Meunier, } "Laser fabrication of three-dimensional microstructures, cavities, and columns", Proc. SPIE 2045, Laser-Assisted Fabrication of Thin Films and Microstructures, (1 February 1994); doi: 10.1117/12.167546; https://doi.org/10.1117/12.167546

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