1 February 1994 Novel process for the fabrication of top-drive double stator micromotor on glass
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Abstract
A top-drive variable capacitance (VC) electrostatic rotational micromotor with double stator was fabricated combining bulk silicon machining with etch stop on junction to anodic bonding of silicon to glass. The novel process overcomes the drawbacks found in the fabrication of top- drive devices by use of usual surface micromachining of polysilicon LPCVD layers.
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Hocine Ziad, Hocine Ziad, Serge Spirkovitch, Serge Spirkovitch, Jeannine Marty, Jeannine Marty, Francois Baillieu, Francois Baillieu, Serge Rigo, Serge Rigo, Neil Milne, Neil Milne, } "Novel process for the fabrication of top-drive double stator micromotor on glass", Proc. SPIE 2045, Laser-Assisted Fabrication of Thin Films and Microstructures, (1 February 1994); doi: 10.1117/12.167563; https://doi.org/10.1117/12.167563
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