1 February 1994 Process planning and scheduling of micromachined transducer
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Abstract
The paper presents the process planning and scheduling of two types of micromachined capacitive transducers for pressure measurements. The fabrication process includes micromachined silicon and glass components. The different stages, process parameters and the required time to obtain devices with flat and corrugated membranes, are presented. The information generated from a laboratory scale experiment is extended to an industrial system. A process that involves the manufacturing of 4,800 devices once on 100 three-layer sandwich structures is studied. A total of 47 activities and 9 alternate operations are identified. For each of them, the time period is established using the acquired experience of the laboratory process. All the techniques and their parameters, the resources are screened and the time necessary to accomplish the above mentioned devices, starting from the si and glass wafers are determined. The activities are considered according to their priorities and two process networks are considered for the two types of devices for flat plate and for corrugated plate. The critical activities and the necessary resources at each step are established. An optimum activities' scheduling for the processes is proposed, in which the priorities and the critical processes are identified. The resource allocations and their capacity are also determined.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
George H. Abdou, Rama B. Bhat, Ion G. Stiharu, "Process planning and scheduling of micromachined transducer", Proc. SPIE 2045, Laser-Assisted Fabrication of Thin Films and Microstructures, (1 February 1994); doi: 10.1117/12.167564; https://doi.org/10.1117/12.167564
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