1 February 1994 Surface patterning by an improved laser-induced forward transfer technique
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Abstract
A simple and inexpensive single-step technique for surface patterning in the micrometers regime is presented. As a result of a systematic study on laser-induced ablation and transfer of tungsten thin films it is shown that deposition of well adhering micrometer sized patterns of 100% coverage preserving the shape and dimensions of the laser processed area can be attained by single pulses of peak power up to 100 mW and 100 microsecond(s) - 1 ms duration from a diode laser pumped YAG laser.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tamas Szoerenyi, Zsolt Toth, Zoltan Kantor, "Surface patterning by an improved laser-induced forward transfer technique", Proc. SPIE 2045, Laser-Assisted Fabrication of Thin Films and Microstructures, (1 February 1994); doi: 10.1117/12.167550; https://doi.org/10.1117/12.167550
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