1 February 1994 Surface patterning by an improved laser-induced forward transfer technique
Author Affiliations +
Abstract
A simple and inexpensive single-step technique for surface patterning in the micrometers regime is presented. As a result of a systematic study on laser-induced ablation and transfer of tungsten thin films it is shown that deposition of well adhering micrometer sized patterns of 100% coverage preserving the shape and dimensions of the laser processed area can be attained by single pulses of peak power up to 100 mW and 100 microsecond(s) - 1 ms duration from a diode laser pumped YAG laser.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tamas Szoerenyi, Tamas Szoerenyi, Zsolt Toth, Zsolt Toth, Zoltan Kantor, Zoltan Kantor, "Surface patterning by an improved laser-induced forward transfer technique", Proc. SPIE 2045, Laser-Assisted Fabrication of Thin Films and Microstructures, (1 February 1994); doi: 10.1117/12.167550; https://doi.org/10.1117/12.167550
PROCEEDINGS
7 PAGES


SHARE
Back to Top