2 November 1993 Gradient index film fabrication using optical control techniques
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The wide range of optical thin film applications utilizing gradient index coatings has prompted the development of advanced optical control techniques. These include ellipsometric and photometric instruments capable of in-situ measurement of optical performance as the optical structure is being deposited. This paper discusses design sensitivity analysis and instrument configuration for development of a control strategy. The ability to measure optical thickness, refractive index and mechanical thickness is a function of several instrument parameters including wavelength, number of wavelengths, angle of incidence, and complexity of measurement surface. The most critical control data in the fabrication of a particular rugate design, and the instrument parameters and techniques employed and how they affect the control strategy is presented in this discussion.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bruce A. Tirri, Jeanne E. Lazo-Wasem, Thomas D. Rahmlow, "Gradient index film fabrication using optical control techniques", Proc. SPIE 2046, Inhomogeneous and Quasi-Inhomogeneous Optical Coatings, (2 November 1993); doi: 10.1117/12.163553; https://doi.org/10.1117/12.163553


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