2 November 1993 Gradient index film fabrication using optical control techniques
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Abstract
The wide range of optical thin film applications utilizing gradient index coatings has prompted the development of advanced optical control techniques. These include ellipsometric and photometric instruments capable of in-situ measurement of optical performance as the optical structure is being deposited. This paper discusses design sensitivity analysis and instrument configuration for development of a control strategy. The ability to measure optical thickness, refractive index and mechanical thickness is a function of several instrument parameters including wavelength, number of wavelengths, angle of incidence, and complexity of measurement surface. The most critical control data in the fabrication of a particular rugate design, and the instrument parameters and techniques employed and how they affect the control strategy is presented in this discussion.
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Bruce A. Tirri, Jeanne E. Lazo-Wasem, Thomas D. Rahmlow, "Gradient index film fabrication using optical control techniques", Proc. SPIE 2046, Inhomogeneous and Quasi-Inhomogeneous Optical Coatings, (2 November 1993); doi: 10.1117/12.163553; https://doi.org/10.1117/12.163553
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